Evaluation of misorientation degree in epitaxial oxide thin films using scanning transmission electron microscopy moiré fringe

نویسندگان

چکیده

Crystal orientation is the key aspect of epitaxially grown ceramic thin films because it significantly affects their properties. In this study, evaluation thin-film using scanning transmission electron microscopy moiré fringes (SMF) demonstrated. The SMF result from combination crystal lattice in bright-field image and raster scanned beam. As reflect against lines, possible to observe distribution epitaxial films. accuracy degrees measured by quantitatively evaluated discussed. a typical example an film, yttria-stabilized zirconia (YSZ) film on Si(001) substrate subjected method analyze misorientation degree through cross section plan view observations.

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ژورنال

عنوان ژورنال: Journal of the Ceramic Society of Japan

سال: 2023

ISSN: ['1882-0743', '1348-6535']

DOI: https://doi.org/10.2109/jcersj2.22168